Influence of Process Parameter on Carbon Nanotube Field Effect Transistor Using Response Surface Methodology

Table 1

Design of experiments for CNTFET.

Thickness (nm)	Voltage (V)
32	0.2
32	0.4
32	0.6
22	0.2
22	0.4
22	0.6
10	0.2
10	0.4
10	0.6