Generation Control of ZnO Nanoparticles Using a Coaxial Gas-Flow Pulse Plasma Ar/O₂ Plasma

Figure 5

(a) SEM image of particles deposited on Si substrate. (b) TEM image of the cross section of (a). Nanoparticles on background surface layer deposited on Si substrate. (c) Magnified nanoparticles in (a). (d) EDX spectrum of nanoparticle marked by + on the particle in (c).

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