Importance of Molds for Nanoimprint Lithography: Hard, Soft, and Hybrid Molds

Figure 8

AFM topography images and profiles (along white lines) of ETFE molds with (a) 833 nm period and (b) 139 nm period and (c) nominally flat mold showing needlelike crystals. Reproduced from [49] with permission of American Vacuum Society.

(a)

(b)

(c)