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Research Letters in Nanotechnology
Volume 2008 (2008), Article ID 492478, 4 pages
Research Letter

A Method for Fabricating Arrays of Nanopatterns with the Feature Size beyond Diffraction Limit

State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu 610209, China

Received 2 September 2008; Accepted 2 November 2008

Academic Editor: Federico Rosei

Copyright © 2008 Shuhong Li et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Citations to this Article [2 citations]

The following is the list of published articles that have cited the current article.

  • Shuhong Li, Xia Huang, Zhiyou Zhang, Ruiying Shi, Fuhua Gao, Yongkang Guo, Yixiao Zhang, and Jinglei Du, “Assembling polystyrenes spheres arrays in specified regions for required nanophotonic structures,” Microelectronic Engineering, 2013. View at Publisher · View at Google Scholar
  • Shuhong Li, Liangke Ren, Zheng Yang, Zhiyou Zhang, Fuhua Gao, Jinglei Du, and Sijie Zhang, “Fabrication of nano metallic holes for color filters based on a controllable self-assembly of polystyrene spheres,” Microelectronic Engineering, vol. 113, pp. 143–146, 2014. View at Publisher · View at Google Scholar