Grids for Applications in High-Temperature High-Resolution Transmission Electron Microscopy

Figure 1

TEM images of ALD Al₂O₃ films with thickness of 2 nm at (a) low magnification, (b) medium magnification, (c) high magnification, and (d) HRTEM. Inset in (a) illustrates the layer-structure of a coated TEM grid with part of the Al₂O₃ film and holey carbon film raised for viewing purpose. Inset in (b) is EDS of the ALD film. The top spectrum comes from the holey carbon region while the bottom one from the thin Al₂O₃ film region. Inset in (d) is SAED of the Al₂O₃ film.

(a)

(b)

(c)

(d)