Research Article

Large-Scale Atmospheric Step-and-Repeat UV Nanoimprinting

Figure 6

Relationship between nonuniformity of the residual layer and imprinting pressure: with low-viscosity resin, the fringe area did not depend on imprinting pressure; with high-viscosity resin, the fringe area was within 10% using an imprinting pressure ≥ 2 MPa.
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