Journal of Nanotechnology / 2012 / Article / Tab 1

Review Article

A Review on Aerosol-Based Direct-Write and Its Applications for Microelectronics

Table 1

Summary of A-DW technology print system characteristics.

MethodMinimum line width ( 𝜇 m)Deposition speed (mm/s)Vacuum requirementOverspray scrubber requiredVOC concernPostprocessing required

Aerosol Jet<10200NoYesYesYes
CAB-DW<5200NoYesYesYes
Aerodynamic lenses~100.01YesYesYesNo
MCS50>10*NoYesNoNo

*Deposition speeds greater than 10 mm/s are possible but have not been experimentally validated.

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