Silicon Nanofabrication by Atomic Force Microscopy-Based Mechanical Processing

Figure 2

AFM profiles of silicon square areas processed by diamond tip sliding for different tip radii. (a) 50, (b) 200, and (c) 100 nm.

(a) Remove groove processed with a 50 nm radius tip

(b) Protuberance profile processed with a 200 nm radius tip

(c) Removal and protuberance profile of silicon with a 100 nm radius tip