Amorphous Silicon-Germanium Films with Embedded Nanocrystals for Thermal Detectors with Very High Sensitivity

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Series #1: SiH<sub>4</sub>/GeH<sub>4</sub> = 1 and Series #2: SiH<sub>4</sub>/GeH<sub>4</sub> = 9.</div>

Journal of Nanotechnology

fig8

Figure 8

Figure 8: Amorphous Silicon-Germanium Films with Embedded Nanocrystals for Thermal Detectors with Very High Sensitivity 