Deposition and Characterization of Molybdenum Thin Film Using Direct Current Magnetron and Atomic Force Microscopy

Table 2

Thickness and the average thickness for Mo thin film with different deposition time.

Unit	nm					nm/s
Deposition time (min)	Test 1	Test 2	Test 3	Test 4	Average	Deposition rate
5	9.27	10.9	12.4	7.89	10.115	0.0337
20	269.96	266.75	268.28	267.44	268.1075	0.2234
35	498.76	491.67	472.11	489.06	485.65	0.2312
65	876.18	878.90	872.44	876.45	875.9925	0.2246
85	1114.40	1116.37	1079.44	1137.29	1111.875	0.2180