Research Article
Low-Temperature Synthesis of Vanadium Dioxide Thin Films by Sol-Gel Dip Coating Method
Table 1
Fabrication parameters of VO2, V2O5, and V6O13 thin films.
| | Phase | Furnace temperature (oC) | Vacuum pressure (mbar) | Calcination (step) |
| | Amorphous | Room temperature | 2 × 10−2 | 1 | | V2O5 | 400 | 2 × 10−2 | 1 | | V2O5 | 450 | 2 × 10−2 | 1 | | VO2+V2O5 | 500 | 2 × 10−2 | 1 | | VO2+V2O5+V6O13 | 500 | 2 × 10−3 | 1 | | VO2 | 500 | 2 × 10−3 | 2 |
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