Nanomaterials and micro/nanodevices are the key components in micro/nanosystems. The wafer-scale integration of nanostructures into micro/nanosystems is highly important for applications of nanostructures. Also, the efficient characterization techniques, especially in situ characterization, are essentially required for investigation and development of nanostructures and micro/nanodevices. Up till now, micro/nanofabrication technologies with superior repeatability, high precision, and low cost, as well as the effective combination of top-down and bottom-up approaches, have become dominant factors in the field of nanotechnology. Furthermore, in situ characterization techniques including XRD, micro Raman, and SEM are also of equal significance for development and applications of nanostructures and micro/nanodevices.

The purpose of this special issue is to publish the most recent advances in synthesis, characterization, and simulation of nanostructures and micro/nanofabrication technologies for micro/nanodevices, with special attention to in situ characterizations and integration of nanostructures into micro/nanosystems. Original research articles and reviews related to these specific topics will be evaluated for novelty, interest, and inspiration.

Potential topics include but are not limited to the following:

• Synthesis and characterization of inorganic functional nanostructures
• Metallic materials with nanoprecipitates
• In situ characterization techniques for micro/nanostructures and micro/nanodevices
• Theory and simulation of micro/nanostructures
• Mechanisms of nanocrystallization
• Micro/nanofabrication technologies for micro/nanodevices
• Nanowire/rod semiconductor devices
• Nanomechanical characterization
• Integration of high-performance nanostructures into micro/nanosystems
• Stability of nanocrystalline structures