Table of Contents
International Journal of Quality, Statistics, and Reliability
Volume 2011 (2011), Article ID 820243, 7 pages
Review Article

On MEMS Reliability and Failure Mechanisms

Department of Mechanical Engineering, The University of Alabama, Tuscaloosa, Al 35487, USA

Received 15 June 2011; Revised 9 August 2011; Accepted 1 September 2011

Academic Editor: Suk joo Bae

Copyright © 2011 Daniel J. Fonseca and Miguel Sequera. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Microelectromechanical systems (MEMS) are a fast-growing field in microelectronics. MEMS are commonly used as actuators and sensors with a wide variety of applications in health care, automotives, and the military. The MEMS production cycle can be classified as three basic steps: (1) design process, (2) manufacturing process, and (3) operating cycle. Several studies have been conducted for steps (1) and (2); however, information regarding operational failure modes in MEMS is lacking. This paper discusses reliability in the context of MEMS functionality. It also presents a brief review of the most relevant failure mechanisms for MEMS.