Table of Contents
International Journal of Quality, Statistics, and Reliability
Volume 2011 (2011), Article ID 820243, 7 pages
http://dx.doi.org/10.1155/2011/820243
Review Article

On MEMS Reliability and Failure Mechanisms

Department of Mechanical Engineering, The University of Alabama, Tuscaloosa, Al 35487, USA

Received 15 June 2011; Revised 9 August 2011; Accepted 1 September 2011

Academic Editor: Suk joo Bae

Copyright © 2011 Daniel J. Fonseca and Miguel Sequera. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Daniel J. Fonseca and Miguel Sequera, “On MEMS Reliability and Failure Mechanisms,” International Journal of Quality, Statistics, and Reliability, vol. 2011, Article ID 820243, 7 pages, 2011. doi:10.1155/2011/820243