Journal of Sensors
Volume 2008 (2008), Article ID 697062, 9 pages
http://dx.doi.org/10.1155/2008/697062
Research Article
Characterizing Vibrating Cantilevers for Liquid Viscosity and Density Sensing
1Institute of Sensor and Actuator Systems, Vienna University of Technology, Gusshausstrasse 27-29/366, 1040 Vienna, Austria
2Institute for Microelectronics and Microsensors, Johannes Kepler University, Altenberger Strasse 69, 4040 Linz, Austria
Received 30 May 2008; Accepted 14 August 2008
Academic Editor: Maria Tenje
Copyright © 2008 Christian Riesch et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Linked References
- E. Nwankwo and C. J. Durning, “Fluid property investigation by impedance characterization of quartz crystal resonators—part I: methodology, crystal screening, and Newtonian fluids,” Sensors and Actuators A, vol. 72, no. 2, pp. 99–109, 1999. View at Publisher · View at Google Scholar
- E. Nwankwo and C. J. Durning, “Fluid property investigation by impedance characterization of quartz crystal resonators—part 2: parasitic effects, viscoelastic fluids,” Sensors and Actuators A, vol. 72, no. 3, pp. 195–202, 1999. View at Publisher · View at Google Scholar
- B. Jakoby and M. J. Vellekoop, “Viscosity sensing using a Love-wave device,” Sensors and Actuators A, vol. 68, no. 1–3, pp. 275–281, 1998. View at Publisher · View at Google Scholar
- B. Jakoby, M. Scherer, M. Buskies, and H. Eisenschmid, “An automotive engine oil viscosity sensor,” IEEE Sensors Journal, vol. 3, no. 5, pp. 562–568, 2003. View at Publisher · View at Google Scholar
- B. Jakoby and M. J. Vellekoop, “Physical sensors for water-in-oil emulsions,” Sensors and Actuators A, vol. 110, no. 1–3, pp. 28–32, 2004. View at Publisher · View at Google Scholar
- A. Agoston, F. Keplinger, and B. Jakoby, “Evaluation of a vibrating micromachined cantilever sensor for measuring the viscosity of complex organic liquids,” Sensors and Actuators A, vol. 123-124, pp. 82–86, 2005. View at Publisher · View at Google Scholar
- P. I. Oden, G. Y. Chen, R. A. Steele, R. J. Warmack, and T. Thundat, “Viscous drag measurements utilizing microfabricated cantilevers,” Applied Physics Letters, vol. 68, no. 26, pp. 3814–3816, 1996. View at Publisher · View at Google Scholar
- J. W. M. Chon, P. Mulvaney, and J. E. Sader, “Experimental validation of theoretical models for the frequency response of atomic force microscope cantilever beams immersed in fluids,” Journal of Applied Physics, vol. 87, no. 8, pp. 3978–3988, 2000. View at Publisher · View at Google Scholar
- C. Bergaud and L. Nicu, “Viscosity measurements based on experimental investigations of composite cantilever beam eigenfrequencies in viscous media,” Review of Scientific Instruments, vol. 71, no. 6, pp. 2487–2491, 2000. View at Publisher · View at Google Scholar
- S. Boskovic, J. W. M. Chon, P. Mulvaney, and J. E. Sader, “Rheological measurements using microcantilevers,” Journal of Rheology, vol. 46, no. 4, pp. 891–899, 2002. View at Publisher · View at Google Scholar
- A. R. H. Goodwin, A. D. Fitt, K. A. Ronaldson, and W. A. Wakeham, “A vibrating plate fabricated by the methods of microelectromechanical systems (MEMS) for the simultaneous measurement of density and viscosity: results for argon at temperatures between 323 and 423 K at pressures up to 68 MPa,” International Journal of Thermophysics, vol. 27, no. 6, pp. 1650–1676, 2006. View at Publisher · View at Google Scholar
- C. Riesch, A. Jachimowicz, F. Keplinger, E. K. Reichel, and B. Jakoby, “A novel sensor system for liquid properties based on a micromachined beam and a low-cost optical readout,” in Proceedings of the 6th IEEE Conference on Sensors (ICSENS '07), pp. 872–875, Atlanta, Ga, USA, October 2007. View at Publisher · View at Google Scholar
- I. Etchart, H. Chen, P. Dryden et al., “MEMS sensors for density-viscosity sensing in a low-flow microfluidic environment,” Sensors and Actuators A, vol. 141, no. 2, pp. 266–275, 2008. View at Publisher · View at Google Scholar
- W. Y. Shih, X. Li, H. Gu, W.-H. Shih, and I. A. Aksay, “Simultaneous liquid viscosity and density determination with piezoelectric unimorph cantilevers,” Journal of Applied Physics, vol. 89, no. 2, pp. 1497–1505, 2001. View at Publisher · View at Google Scholar
- T. L. Wilson, G. A. Campbell, and R. Mutharasan, “Viscosity and density values from excitation level response of piezoelectric-excited cantilever sensors,” Sensors and Actuators A, vol. 138, no. 1, pp. 44–51, 2007. View at Publisher · View at Google Scholar
- B. Weiss, E. K. Reichel, and B. Jakoby, “Modeling of a clamped-clamped beam vibrating in a fluid for viscosity and density sensing regarding compressibility,” Sensors and Actuators A, vol. 143, no. 2, pp. 293–301, 2008. View at Publisher · View at Google Scholar
- J. E. Sader, “Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope,” Journal of Applied Physics, vol. 84, no. 1, pp. 64–76, 1998. View at Publisher · View at Google Scholar
- C. A. Van Eysden and J. E. Sader, “Small amplitude oscillations of a flexible thin blade in a viscous fluid: exact analytical solution,” Physics of Fluids, vol. 18, no. 12, Article ID 123102, 11 pages, 2006. View at Publisher · View at Google Scholar
- C. Atkinson and M. Manrique de Lara, “The frequency response of a rectangular cantilever plate vibrating in a viscous fluid,” Journal of Sound and Vibration, vol. 300, no. 1-2, pp. 352–367, 2007. View at Publisher · View at Google Scholar
- “Argillon data sheet for bending actuators,” Argillon GmbH, Redwitz, Germany, 2003, http://www.argillon.com.
- H. Parkus, Mechanik der festen Körper, Springer, Wien, Austria, 1960.
- M. Nader, Compensation of vibrations in smart structures: shape control, experimental realization and feedback control, Ph.D. dissertation, Johannes Kepler University, Linz, Austria, 2007.
- L. D. Landau and E. M. Lifshitz, Fluid Mechanics, Pergamon Press, London, UK, 1959.