Design and Fabrication of Slotted Multimode Interference Devices for Chemical and Biological Sensing

<table>(a) 3D power distribution and (b) 2D cross-section image of a six-slot MMI sensor with cover liquid refractive index of 1.468 at <svg height="12.4375" id="M37" style="vertical-align:-0.1638pt" version="1.1" viewbox="0 0 12.3375 12.4375" width="12.3375" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,12.162)"><path d="M529 97q-70 -109 -136 -109q-41 0 -56 94q-23 144 -37 284q-38 -88 -99 -202.5t-93 -156.5q-26 -8 -76 -19l-9 21q71 78 145.5 193t124.5 232q-5 84 -15 128q-12 55 -29.5 75.5t-42.5 20.5q-21 0 -45 -13l-8 24q16 17 46 30t55 13q43 0 70 -46.5t40 -169.5
q27 -249 51 -392q7 -46 23 -46q24 0 70 60z" id="x1D706"></path></g>
</svg>= 780 nm. (c) 3D power distribution and (d) 2D cross-section with cover index of 1.465848 at <svg height="12.4375" id="M38" style="vertical-align:-0.1638pt" version="1.1" viewbox="0 0 12.3375 12.4375" width="12.3375" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,12.162)"><path d="M529 97q-70 -109 -136 -109q-41 0 -56 94q-23 144 -37 284q-38 -88 -99 -202.5t-93 -156.5q-26 -8 -76 -19l-9 21q71 78 145.5 193t124.5 232q-5 84 -15 128q-12 55 -29.5 75.5t-42.5 20.5q-21 0 -45 -13l-8 24q16 17 46 30t55 13q43 0 70 -46.5t40 -169.5
q27 -249 51 -392q7 -46 23 -46q24 0 70 60z" id="x1D706"></path></g>
</svg>= 780 nm.</table>

Journal of Sensors

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Figure 7

Figure 7: Design and Fabrication of Slotted Multimode Interference Devices for Chemical and Biological Sensing 