Review Article

A Complex of the Electromagnetic Biosensors with a Nanowired Pickup

Figure 3

The CNTFETs fabricated by depositing the HfO2 on DNA-functionalized SWCNTs with atomic layer deposition (ALD) technique: (a) Schematic of a DNA coated SWNT, (b) Cross-sectional view of HfO2 (~3 nm by ALD) conformally deposited on a DNA functionalized nanotube lying on a SiO2 substrate, (c) Atomic force microscopy (AFM) image of a high SWNT FET with top-gate ( ), underlapping source ( ), and drain ( ). Reprinted with permission from [7]. Copyright 2006 American Chemical Society.
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