A Complex of the Electromagnetic Biosensors with a Nanowired Pickup
Figure 3
The CNTFETs fabricated by depositing the HfO2 on DNA-functionalized SWCNTs with atomic layer deposition (ALD) technique: (a) Schematic of a DNA coated SWNT, (b) Cross-sectional view of HfO2 (~3 nm by ALD) conformally deposited on a DNA functionalized nanotube lying on a SiO2 substrate, (c) Atomic force microscopy (AFM) image of a high SWNT FET with top-gate (), underlapping source (), and drain (). Reprinted with permission from [7]. Copyright 2006 American Chemical Society.