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Journal of Sensors
Volume 2009, Article ID 637874, 10 pages
http://dx.doi.org/10.1155/2009/637874
Review Article

Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection

1State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China
2State Key Lab of High Performance Ceramics and Superfine Microstructures, Shanghai Institute of Ceramics, Chinese Academy of Sciences, 1295 Dingxi Road, Shanghai 200050, China

Received 6 January 2009; Accepted 14 April 2009

Academic Editor: Michele Penza

Copyright © 2009 Xinxin Li et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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