Ta<sub>2</sub>O<sub>5</sub> Thin Films for Capacitive RF MEMS Switches

<table>Typical current transient recorded by applying <svg height="9.8999996" id="M26" style="vertical-align:-0.2475pt" version="1.1" viewbox="0 0 45.025002 9.8999996" width="45.025002" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,9.9)">
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<text transform="matrix(1,0,0,-1,-71.95,64.37)">
<tspan style="font-size: 11.21px; " x="0" y="0">𝐸</tspan>
<tspan style="font-size: 11.21px; " x="11.107128" y="0">=</tspan>
<tspan style="font-size: 11.21px; " x="21.900433" y="0">0</tspan>
<tspan style="font-size: 11.21px; " x="27.504433" y="0">.</tspan>
<tspan style="font-size: 11.21px; " x="30.306433" y="0">9</tspan>
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</svg> MV/cm. The solid line is the fit to the current data with (<a href="https://static.hindawi.com/articles/js/volume-2010/487061/figures/#EEq3">3</a>).</table>

Journal of Sensors

fig3

Figure 3

Figure 3: Ta<sub>2</sub>O<sub>5</sub> Thin Films for Capacitive RF MEMS Switches 

Journal of Sensors

Ta2O5 Thin Films for Capacitive RF MEMS Switches

Figure 3

Ta₂O₅ Thin Films for Capacitive RF MEMS Switches