Ta<sub>2</sub>O<sub>5</sub> Thin Films for Capacitive RF MEMS Switches

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Journal of Sensors

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Figure 6

Figure 6: Ta<sub>2</sub>O<sub>5</sub> Thin Films for Capacitive RF MEMS Switches 

Journal of Sensors

Ta2O5 Thin Films for Capacitive RF MEMS Switches

Figure 6

Ta₂O₅ Thin Films for Capacitive RF MEMS Switches