Research Article

A Fourier Ellipsometer Using Rotating Polarizer and Analyzer at a Speed Ratio 1 : 1

Figure 5

Percent error in the calculated values of 𝑛 and 𝑘 for Au and c-Si using the proposed RPA ellipsometer using the set containing ( 𝑔 1 , 𝑔 2 , 𝑔 3 ) and that containing ( 𝑔 0 , 𝑔 2 , 𝑔 3 ) .
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