Experiments on the Release of CMOS-Micromachined Metal Layers

<table>Interferometer view of a 3-layer comb-type CMOS-MEMS actuator after a release with pad-etchant, suggesting breakage between the different layers in some of the fingers. The structure was released with pad-etchant after 60 minutes.</table>

Journal of Sensors

fig14

Figure 14

Figure 14: Experiments on the Release of CMOS-Micromachined Metal Layers 