Square Diaphragm CMUT Capacitance Calculation Using a New Deflection Shape Function

<table>Comparison of FEA deflection profile with the new and the existing models for the 3-<i>μ</i>m thick polysilicon diaphragm for small deflection, plotted along the diagonal axis of the diaphragm. <svg height="15.25" id="M109" style="vertical-align:-3.27605pt" version="1.1" viewbox="0 0 67.612503 15.25" width="67.612503" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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</svg> kPa.</table>

Journal of Sensors

fig11

Figure 11

Figure 11: Square Diaphragm CMUT Capacitance Calculation Using a New Deflection Shape Function 