Square Diaphragm CMUT Capacitance Calculation Using a New Deflection Shape Function

<table>Comparison of FEA deflection profiles with the new model for the 1-<i>μ</i>m thick polysilicon diaphragms with different sidelengths, plotted from center to diaphragm edge. <svg height="16.450001" id="M122" style="vertical-align:-3.3907pt" version="1.1" viewbox="0 0 432.27499 16.450001" width="432.27499" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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</svg> <i>μ</i>m, respectively.</table>

Journal of Sensors

fig17

Figure 17

Figure 17: Square Diaphragm CMUT Capacitance Calculation Using a New Deflection Shape Function 