Measurement of Hepatitis B Surface Antigen Concentrations Using a Piezoelectric Microcantilever as a Mass Sensor

Table 1

Material properties and parameters used in mechanical lumped parameter model of piezoelectric microcantilever sensor (PEMS) [12].

Quantity	Unit	Value	Expression	Remark
Silicon
E	GPa	170	Young’s modulus
𝜌	kg/m^3	2329	Density
𝜈		0.28	Poisson’s ratio
Piezoelectric layer
E	GPa	Anisotropic		PZT5H
𝜌	kg/m^3	7500
Resonance frequency (𝑓0)	MHz	1.345479	𝑓0=(1/2𝜋)√𝐾eff/𝑀eff; In fundamental mode	Theoretical data
Effective stiffness (𝐾eff)	N/m	234	𝐾eff=2𝐸strain/𝛿^2max,; where 𝐸strain is strain energy and 𝛿max is the maximum displacement of the free end of the PEMS in fundamental mode	Theoretical data
Effective mass (𝑀eff)	ng	3.272	𝑀eff=𝑘eff/4𝜋^2𝑓^20	Theoretical data