Predictions of the Compressible Fluid Model and its Comparison to Experimental Measurements of Factors and Flexural Resonance Frequencies for Microcantilevers
Figure 3
Resonance frequency and factor versus mode number comparison between theory and experiment for the 7 μm thick cantilevers. The solid square symbols with dotted lines correspond to the extended viscous model, while the solid circles with dashed lines correspond to the compressible fluid model. The open symbols with solid lines correspond to the experimental data. In the frequency plot the experimental data are overlapping.
