Predictions of the Compressible Fluid Model and its Comparison to Experimental Measurements of 𝑄 Factors and Flexural Resonance Frequencies for Microcantilevers

Figure 4

Repeated measurement of the 𝑄 factor versus mode number for a single cantilever without removing the array between measurements. The standard deviation of the 𝑄 factors for modes 1–3 is 0.003% and the standard deviation for mode 4 is 0.02%. This indicated that the previously observed larger standard deviations were due to difference in the coupling between the cantilever and the piezo between experiments.