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Journal of Sensors
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2012
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Article
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Fig 1
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Research Article
An Astigmatic Detection System for Polymeric Cantilever-Based Sensors
Figure 1
Detection scheme of the astigmatic detection system, (a) optical path configuration, (b) laser spot on PDIC, and the focus error signal; the linear region is about 6
μ
m.
(a)
(b)