TY - JOUR A2 - Jeon, Sangmin AU - Mishra, Rohit AU - Grange, Wilfried AU - Hegner, Martin PY - 2012 DA - 2011/10/19 TI - Rapid and Reliable Calibration of Laser Beam Deflection System for Microcantilever-Based Sensor Setups SP - 617386 VL - 2012 AB - Cantilever array-based sensor devices widely utilise the laser-based optical deflection method for measuring static cantilever deflections mostly with home-built devices with individual geometries. In contrast to scanning probe microscopes, cantilever array devices have no additional positioning device like a piezo stage. As the cantilevers are used in more and more sensitive measurements, it is important to have a simple, rapid, and reliable calibration relating the deflection of the cantilever to the change in position measured by the position-sensitive detector. We present here a simple method for calibrating such systems utilising commercially available AFM cantilevers and the equipartition theorem. SN - 1687-725X UR - https://doi.org/10.1155/2012/617386 DO - 10.1155/2012/617386 JF - Journal of Sensors PB - Hindawi Publishing Corporation KW - ER -