Rapid and Reliable Calibration of Laser Beam Deflection System for Microcantilever-Based Sensor Setups

Table 1

Manufacturer specifications of the cantilevers used for calibration factor measurement.

Specifications	Mikromasch CSC38/AIBS “B”			NTMDT CSCS12 “E”
	Min	Typical	Max	Min	Typical	Max
Length (l) μm		350			350
Width (w) μm		35			35
Thickness, μm	0.7	1.0	1.3	0.9	1.0	1.1
Resonant frequency (kHz)	7	10	14	8	10	12
Force constant (N/m)	0.01	0.03	0.08	0.02	0.03	0.04