A Review: Carbon Nanotube-Based Piezoresistive Strain Sensors

Figure 6

(a) A single-walled carbon nanotube device on a membrane with the bottom layer serving as the gate electrode. (b) An optical image of the membrane (~1 mm on a side) with electrodes. (c) The devices (14 μm apart) are zoomed near the edge of the membrane, (d) SEM image of a single-walled carbon nanotube crossing the gap (~800 nm) between two electrodes [8].