Research on Nonlinear Dynamics of Drive Mode in Z-Axis Silicon Microgyroscope

Figure 1

Simplified schematic of drive mode in -axis silicon gyroscope. 1. Beam 1: straight beam, 2. Beam 2: parallel combination, 3. proof mass, 4. Beam 3: serial combination, 5. anchor, 6. sense comb, and 7. drive comb.