Research on Nonlinear Dynamics of Drive Mode in Z-Axis Silicon Microgyroscope

Table 1

Structural parameters for drive mode of silicon gyroscope.

Parameter	Value	Unit
Proof mass	1.36	mg
Linear natural frequency	3320	Hz
Quality factor	2800	—
Comb actuator
N	900	—
h	60	μm
	10	μm
e	4	μm
d	4	μm