Frequency Tuning of Work Modes in <i>Z</i>-Axis Dual-Mass Silicon Microgyroscope

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Journal of Sensors

fig13

Figure 13

Figure 13: Frequency Tuning of Work Modes in <i>Z</i>-Axis Dual-Mass Silicon Microgyroscope 

Journal of Sensors

Frequency Tuning of Work Modes in Z-Axis Dual-Mass Silicon Microgyroscope

Figure 13