Frequency Tuning of Work Modes in Z-Axis Dual-Mass Silicon Microgyroscope

Table 4

Frequency tuning rate for drive mode and sense mode.

	Tuning rate of drive U-beams (Hz/m)		Tuning rate of sense U-beams (Hz/m)		Tuning rate of capacitors (Hz/V)
	width	length
Drive mode	353.5	−10.7	0	0	0
Sense mode	0	0	583.7	−15.0	−10.8