Long-Stroke Nanopositioning Stage Driven by Piezoelectric Motor

Table 1

Positioning errors analysis of -axis (unit in nm).

Travel	1st	2nd	3rd	4th	5th	Mean
3 mm	−14	23	6	3	6	5	13
6 mm	48	−36	5	12	−2	5	30
9 mm	53	23	−20	2	−10	10	29
12 mm	32	−24	−42	52	−22	−1	40
15 mm	8	−23	−14	−7	50	3	29