Long-Stroke Nanopositioning Stage Driven by Piezoelectric Motor

Table 2

Positioning errors analysis of -axis (unit in nm).

Travel	1st	2nd	3rd	4th	5th	Mean
3 mm	3	−26	5	6	15	1	16
6 mm	1	5	−18	−33	0	−9	16
9 mm	−23	11	30	−27	15	1	25
12 mm	38	−26	9	−16	−30	−5	28
15 mm	10	12	−36	−30	−29	−15	24