Research Article
Design and Optimization of a Low Power Pressure Sensor for Wireless Biomedical Applications
Table 1
Mechanical material properties [
20,
21].
| Property | Value |
| | 165.7 GPa | | 63.9 GPa | | 79.36 GPa | density | 2330 kg/m3 | Poisson's ratio | |
|
|
[110] direction.
|