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Journal of Sensors
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2015
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Article
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Tab 2
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Research Article
Design and Optimization of a Low Power Pressure Sensor for Wireless Biomedical Applications
Table 2
Piezoresistive coefficients and doping [
17
].
Property
Value
MPa
−1
MPa
−1
MPa
−1
Doping
Ion implantation
Concentration
cm
−3