Fabrication of Porous Silicon Based Humidity Sensing Elements on Paper

Figure 5

(a) Relative capacitive response to changes in RH concentration shows that different concentrations can be clearly distinguished and that with proper thickness of the sensing layer the signal from the sensing layer is clearly stronger than the signal from the substrate. (b) Four consecutive RH 85% pulses demonstrate that the response is quite consistent, providing reproducible results.

(a)

(b)