Table of Contents Author Guidelines Submit a Manuscript
Journal of Sensors
Volume 2016 (2016), Article ID 1353212, 8 pages
http://dx.doi.org/10.1155/2016/1353212
Research Article

Detailed Analysis of the Timing Measurements in Optical Position Sensing Devices Based on Laser Beam Deflection

Carinthian Tech Research AG, Europastrasse 12, 9524 Villach, Austria

Received 30 August 2015; Accepted 23 November 2015

Academic Editor: Marco Consales

Copyright © 2016 Andreas Tortschanoff. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. M. E. Motamedi, Ed., MOEMS: Micro-Opto-Electro-Mechanical Systems, SPIE Press, 2005.
  2. S. T. S. Holmström, U. Baran, and H. Urey, “MEMS laser scanners: a review,” Journal of Microelectromechanical Systems, vol. 23, no. 2, Article ID 6714402, pp. 259–275, 2014. View at Publisher · View at Google Scholar · View at Scopus
  3. C. Winter, L. Fabre, F. Lo Conte et al., “Micro-beamer based on MEMS micro-mirrors and laser light source,” Procedia Chemistry, vol. 1, no. 1, pp. 1311–1314, 2009. View at Publisher · View at Google Scholar
  4. A. D. Yalçınkaya, H. Urey, D. Brown, T. Montague, and R. Sprague, “Two-axis electromagnetic microscanner for high resolution displays,” Journal of Microelectromechanical Systems, vol. 15, no. 4, pp. 786–794, 2006. View at Publisher · View at Google Scholar · View at Scopus
  5. F. Zimmer, H. Grueger, A. Heberer, A. Wolter, and H. Schenk, “Development of a NIR microspectrometer based on a MOEMS scanning grating,” in MEMS, MOEMS, and Micromachining, vol. 5455 of Proceedings of SPIE, p. 9, Strasbourg, France, April 2004. View at Publisher · View at Google Scholar
  6. U. Hofmann, J. Janes, and H.-J. Quenzer, “High-Q MEMS resonators for laser beam scanning displays,” Micromachines, vol. 3, no. 2, pp. 509–528, 2012. View at Publisher · View at Google Scholar · View at Scopus
  7. B. Borovic, A. Q. Liu, D. Popa, H. Cai, and F. L. Lewis, “Open-loop versus closed-loop control of MEMS devices: choices and issues,” Journal of Micromechanics and Microengineering, vol. 15, no. 10, pp. 1917–1924, 2005. View at Publisher · View at Google Scholar · View at Scopus
  8. A. Tortschanoff, M. Lenzhofer, A. Frank et al., “Position encoding and phase control of resonant MOEMS mirrors,” Sensors and Actuators A, vol. 162, no. 2, pp. 235–240, 2010. View at Publisher · View at Google Scholar · View at Scopus
  9. A. Tortschanoff, A. Frank, M. Wildenhain, T. Sandner, and A. Kenda, “Optical position encoding and phase control of an electrostatically driven two-dimensional MOEMS scanner at two resonant modes,” Journal of Micro/ Nanolithography, MEMS, and MOEMS, vol. 10, no. 3, Article ID 033006, 2011. View at Publisher · View at Google Scholar
  10. H. Schenk, P. Dürr, D. Kunze, and H. Kück, “A new driving principle for micromechanical torsional actuators,” in Proceedings of the International Mechanical Engineering Congress and Exposition (MEMS '99), vol. 1, pp. 333–338, Nashville,Tenn, USA, 1999.
  11. A. Wolter, H. Schenk, E. Gaumont, and H. Lakner, “Improved layout for a resonant 2D micro scanning mirror with low operation voltages,” in MOEMS Display and Imaging Systems, vol. 4985 of Proceedings of SPIE, p. 72, January 2003. View at Publisher · View at Google Scholar
  12. H. Schenk, P. Dürr, T. Haase et al., “Large deflection micromechanical scanning mirrors for linear scans and pattern generation,” IEEE Journal on Selected Topics in Quantum Electronics, vol. 6, no. 5, pp. 715–722, 2000. View at Publisher · View at Google Scholar · View at Scopus
  13. Antriebsprinzip zur Erzeugung resonanter Schwingungen von beweglichen Teilen mikromechanischer Bauelemente, European Patent EP 1 123 526 B1.
  14. A. Tortschanoff, M. Baumgart, A. Frank et al., “Optical position feedback for electrostatically driven MOEMS scanners,” in MOEMS and Miniaturized Systems XI, vol. 8252 of Proceedings of SPIE, San Francisco, Calif, USA, January 2012. View at Publisher · View at Google Scholar