Adaptive Fuzzy Sliding Mode Control of MEMS Gyroscope with Finite Time Convergence

<div>The basic principle diagram of <svg height="6.44133pt" id="M22" style="vertical-align:-0.29774pt" version="1.1" viewbox="-0.0498162 -6.14359 6.59789 6.44133" width="6.59789pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M475 445L452 468C423 436 401 426 385 426S352 427 305 436C268 443 216 448 185 448C156 448 128 425 102 382C89 360 77 338 64 304L89 291C117 340 143 380 190 380C214 380 268 376 295 373C320 370 344 371 362 374L70 101C32 65 23 36 23 18C23 5 27 -3 31 -8C36 -8 39 -6 42 -1C52 15 67 31 80 40S110 49 143 33C195 8 257 -20 290 -20C339 -20 382 11 439 129L416 148C366 74 334 55 305 55C278 55 236 68 203 81C169 94 141 100 122 96C205 170 348 308 411 376L475 445Z" id="g113-123"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="498" vert-adv-y="498"></glyph.data></g></svg>-axis vibratory MEMS gyroscope.</div>

Journal of Sensors

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Figure 2

Figure 2: Adaptive Fuzzy Sliding Mode Control of MEMS Gyroscope with Finite Time Convergence 