In₂O₃- and SnO₂-Based Thin Film Ozone Sensors: Fundamentals

Figure 12

(a) Dependencies of intensities of lattice Sn3d and O1s XPS peaks on surface carbon concentration and (b) influence of various thermal treatments on the intensities of O1s and C1s peaks of SnO₂ X-ray photoelectron spectra : A: dry air, = 300°C,  min; B: humid air, = 300°C,  min. Data extracted from [154].