In₂O₃- and SnO₂-Based Thin Film Ozone Sensors: Fundamentals

Figure 21

Influence of deposition temperature on the sensitivity to air humidity of SnO₂ sensor response to ozone (~1 ppm). Sensitivity to air humidity was calculated as a ratio of responses measured in dry (1-2% RH) and wet (~45% RH) atmospheres at corresponding to maximum response in humid atmosphere ( nm). Adapted with permission from [56]. Copyright 2007 Elsevier.