In₂O₃- and SnO₂-Based Thin Film Ozone Sensors: Fundamentals

Figure 27

(a) Influence the air humidity on temperature dependencies of (1–3) response and (4–6) recovery times during ozone detection by In₂O₃-based sensors ( = 475°C;  nm; 1.0 M InCl₃-solution): 1, 4: ~0.5% RH; 2, 5: ~25–30 RH; (3, 6): ~60% RH; (b) temperature dependencies of the time constants during ozone detection by In₂O₃ ultrathin films in wet (35–40% RH) and dry (1-2% RH) atmospheres ( = 475°C): 1, 2: 0.05 M InCl₃-solution,  nm; 3, 4, and 5: 1.0 M InCl₃-solution,  nm. Adapted with permission from [54]. Copyright 2007 Elsevier.

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