In₂O₃- and SnO₂-Based Thin Film Ozone Sensors: Fundamentals

Figure 29

Response and recovery times of RT sensor response to ozone in dependence on the layer thickness. Nanoparticle In₂O₃ layer was grown at a substrate temperature of 200°C. Photoreduction was carried out using UV LED (375 nm). Adapted with permission from [176]. Copyright 2007 American Institute of Physics.