Accelerometer Sensor Specifications to Predict Hydrocarbon Using Passive Seismic Technique

Table 1

A Comparative analysis on the characterization and noise analysis of MEMS device [9].

Paper	Device or structure	Focus	Characterization
Gabrielson [10]	Accelerometers, pressure sensors, capacitive microphones	Mechanical-thermal noise	Theory
Djuric [11]	Accelerometers, infrared thermal detector, microbeams	Several mechanisms	Theory
Djuric et al. [12]	Microcantilevers and microresonators	Several mechanisms	Theory and computations
Greiner and Korvink [13]	Micro bars	Mechanical noise	Theory
Vig and Kim [14]	Resonators (microbeams)	Several mechanisms	Theory and computations
Leland [15]	Gyroscopes	Mechanical-thermal noise	Theory