Research Article
Modal Analysis of a Single-Structure Multiaxis MEMS Gyroscope
Table 3
Mechanical sensing parameters of the proposed design.
| | Sensing parameters | | Sense quality factor = 2500 |
| | -gyro | | Frequency () | Change in frequency
( | Stiffness () | Moment of inertia () | -gyro sensing spring | | Length | Width |
| | 13407 Hz | 101 Hz | Nm | kgm2 | 776 μm | 3.5 μm |
| | -gyro | | Frequency ( | Change in frequency
( | Stiffness () | Moment of inertia () | -gyro sensing spring | | Length | Width |
| | 13515 Hz | 209 Hz | Nm | kgm2 | 776 μm | 3.5 μm |
| | -gyro | | Frequency ( | Change in frequency
( | Stiffness () | Mass | -gyro sensing spring | | Length | Width |
| | 13515 Hz | 209 Hz | 43.8 N/m | kg | 174 μm | 3 μm |
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