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Journal of Sensors
Volume 2016, Article ID 6086752, 5 pages
http://dx.doi.org/10.1155/2016/6086752
Research Article

Ru-Based Thin Film Temperature Sensor for Space Environments: Microfabrication and Characterization under Total Ionizing Dose

1Department of Electronic Engineering, University of Valencia, Avenida de la Universitat, s/n, 46100 Burjassot, Spain
2INESC Microsystems and Nanotechnologies (INESC-MN) and Physics Department, Instituto Superior Técnico, Lisbon University, R. Alves Redol 9, 1000-029 Lisbon, Portugal
3International Iberian Nanotechnology Laboratory (INL), Avenida Mestre José Veiga, 4715-31 Braga, Portugal

Received 15 December 2015; Revised 29 February 2016; Accepted 21 March 2016

Academic Editor: Oleg Lupan

Copyright © 2016 S. I. Ravelo Arias et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

S. I. Ravelo Arias, D. Ramírez Muñoz, Susana Cardoso, and Paulo P. Freitas, “Ru-Based Thin Film Temperature Sensor for Space Environments: Microfabrication and Characterization under Total Ionizing Dose,” Journal of Sensors, vol. 2016, Article ID 6086752, 5 pages, 2016. https://doi.org/10.1155/2016/6086752.