Modeling, Design, and Fabrication of Self-Doping Si<sub>1−<i>x</i></sub>Ge<sub><i>x</i></sub>/Si Multiquantum Well Material for Infrared Sensing

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41 97 35 33 30V0H257Z" id="g58-103"></path><glyph.data ascent="1007" descent="-369" horiz-adv-x="275" vert-adv-y="275"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,9.813,3.001)"><path d="M389 0V32C297 38 291 46 291 118V635C234 613 175 595 109 583V556L161 554C203 552 207 547 207 497V118C207 46 201 38 110 32V0H389Z" id="g50-50"></path><glyph.data ascent="3443" descent="-2856" horiz-adv-x="487" vert-adv-y="487"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,14.244,3.001)"><path d="M556 236V289H56V236H556Z" id="g54-33"></path><glyph.data ascent="3443" descent="-2856" horiz-adv-x="611" vert-adv-y="611"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,19.804,3.001)"><path d="M545 403C545 425 527 451 498 451C448 451 400 404 312 286L290 341C262 412 246 451 219 451C182 451 138 404 92 345L112 323C152 368 169 378 181 378C192 378 201 359 216 321L257 214C184 115 142 69 113 69C102 69 93 73 88 79S78 89 68 89C47 89 24 61 24 40C24 8 49 -12 75 -12C125 -12 175 31 271 175L312 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Journal of Sensors

fig5

Figure 5

Figure 5: Modeling, Design, and Fabrication of Self-Doping Si<sub>1−<i>x</i></sub>Ge<sub><i>x</i></sub>/Si Multiquantum Well Material for Infrared Sensing 

Journal of Sensors

Modeling, Design, and Fabrication of Self-Doping Si1−xGex/Si Multiquantum Well Material for Infrared Sensing

Figure 5

Modeling, Design, and Fabrication of Self-Doping Si_1−xGe_x/Si Multiquantum Well Material for Infrared Sensing